Browsing by Author "Reid, Chris"
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Publication Electrochemical, physical, and electrical characterization of two clean solutions for Cu PCMP clean
Meeting abstract2010, 10th International Symposium on Ultra-Clean Processing of Semiconductor Devices - UCPSS, 19/09/2010, p.64-65Publication Electrochemical, physical, and electrical characterization of two clean solutions for Cu PCMP clean
Journal article2012-04, Solid State Phenomena, 187, p.235-239