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Browsing by Author "Renwick, Stephen P."

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    Impact of illumination source symmetrization in OPC

    Sturtevant, John L.
    ;
    Hong, Le
    ;
    Jayaram, Srividya
    ;
    Renwick, Stephen P.
    ;
    McCallum, Martin
    Proceedings paper
    2008, Photomask and Next-Generation Lithography Mask Technology XV, 16/04/2008, p.70283M

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