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Browsing by Author "Rezvani, Seyed Javid"

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    Publication

    The hidden energy tail of low energy electrons in EUV lithography

    Fallica, Roberto  
    ;
    Rezvani, Seyed Javid
    ;
    Nannarone, Stefano
    ;
    Borisov, Sergei
    ;
    De Simone, Danilo  
    Proceedings paper
    2019, Advances in Patterning Materials and Processes XXXVI, 24/02/2019, p.1096009

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