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Browsing by Author "Rhie, S.U."

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    Publication

    Exploration of etch step interactions in the dual patterning process for process modeling

    Melvin, Lawrence
    ;
    Ward, Brian
    ;
    Song, H.
    ;
    Rhie, S.U.
    ;
    Lucas, K.D.
    ;
    Wiaux, Vincent  
    ;
    Verhaegen, Staf
    Journal article
    2008, Journal of Vacuum Science and Technology B, (26) 6, p.2434-2434

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