Browsing by Author "Rink, I."
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Publication Alternative post-etch polymer removal in a single-wafer platform
Publication Calibration of straight total reflection X-ray fluorescence spectrometry - results of a European round robin test
Journal article2001, Spectrochimica Acta Part B-Atomic Spectroscopy, (56) 11, p.2283-2292Publication Vapor phase decomposition - droplet collection evalutation of a wafer surface preparation system
Proceedings paper2000, Cleaning Technology in Semiconductor Device Manufacturing. Proceedings of the 6th International Symposium, 17/10/1999, p.593-600Publication Vapor phase decomposition - droplet collection: Evalutation of a wafer surface preparation system
Meeting abstract1999, Electrochemical Society Fall Meeting: 6th International Symposium on Cleaning Technology in Semiconductor Device Manufacturing, 17/10/1999, p.1125