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    Random 2D Metal Single Patterning Capability Using 0.55NA EUV Lithography

    Besset, Nicolas
    ;
    Xu, Dongbo
    ;
    Philipsen, Vicky  
    ;
    Gillijns, Werner  
    ;
    Rissberger, Sophie
    Proceedings paper
    2026, Optical and EUV Nanolithography XXXIX;, 2026-02-22, p.139791F

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