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Browsing by Author "Rivera, Bernardo Oyarzun"

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    Dry resist process development toward depth of focus improvement in high NA EUV lithography

    Huang, Ching-Chung
    ;
    Haider, Ali
    ;
    Chen, Zhengtao
    ;
    Gullo, Francesco
    ;
    Brouri, Mohand
    Journal article
    2026, JOURNAL OF MICRO-NANOPATTERNING MATERIALS AND METROLOGY-JM3, (25) 2, p.021205

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