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Browsing by Author "Robertson, Steward A"

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    A compact physical CD-SEM simulator for IC photolithography modeling applications

    Fang, Chao
    ;
    Smith, Mark D
    ;
    Vaglio Pret, Alessandro  
    ;
    Biafore, John
    ;
    Robertson, Steward A
    Proceedings paper
    2014, Scanning Microscopies 2014, 16/09/2014, p.923618

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