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    DSA graphoepitaxy calibrations for contact hole multiplication

    Graves, Trey
    ;
    Vaglio Pret, Alessandro  
    ;
    Robertson, Stuart
    ;
    Smith, Mark
    ;
    Doise, Jan  
    ;
    Bekaert, Joost  
    Proceedings paper
    2015, Advances in Patterning Materials and Processes XXXII, 22/02/2015, p.94250Y

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