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Browsing by Author "Romanuk, B. N."

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    Use of gettering and defect induced processes in ultra-thin buried oxide synthesis

    Litovchenko, V. G.
    ;
    Efremov, A. A.
    ;
    Romanuk, B. N.
    ;
    Mel'nik, V. P.
    ;
    Claeys, Cor
    Proceedings paper
    1997, Proceedings of the 7th Conference on Gettering and Defect Engineering in the Semiconductor Technology - GADEST '97, 5/10/1997, p.97-102

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