Browsing by Author "Romanuk, B. N."
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Publication Use of gettering and defect induced processes in ultra-thin buried oxide synthesis
;Litovchenko, V. G. ;Efremov, A. A. ;Romanuk, B. N. ;Mel'nik, V. P.Claeys, CorProceedings paper1997, Proceedings of the 7th Conference on Gettering and Defect Engineering in the Semiconductor Technology - GADEST '97, 5/10/1997, p.97-102