Browsing by Author "Rothschild, Mordechai"

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Experimental measurements of diffraction for periodic patterns by 193-nm polarized radiation compared to rigorous EMF simulations

Bennett, Marylyn Hoy
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Grenville, Andrew
;
Hector, Scott
;
Palmer, Shane
;
Leunissen, Peter
Proceedings paper
2005, Optical Microlithography XVIII, 27/02/2005, p.599-610
High refractive index fluid evaluations: fluid radiation durabilitylifetimes and fluid/resist interactions

French, Roger H.
;
Bernfeld, Adam S.
;
Tran, Hoang V.
;
Adelman, Douglas J.
;
Liberman, Vladimir
Proceedings paper
2008, 5th International Symposium on Immersion Lithography Extensions, 22/09/2008