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Browsing by Author "Roy, Hemanta"

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    Deep learning-based defect detection using large FOV SEM for 28 nm pitch BEOL layer patterned with 0.33NA single exposure EUV

    Das, Sayantan  
    ;
    Sah, Kaushik
    ;
    Liang, Ardis
    ;
    Roy, Hemanta
    ;
    Tran, Kha
    ;
    Babu, Binesh
    ;
    Hegde, Arjun
    Proceedings paper
    2021, International Conference on Extreme Ultraviolet Lithography, SEP 27-OCT 01, 2021, p.118540Y

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