Repository logo Institutional repository
  • Communities & Collections
  • Scientific publicationsOpen knowledge
Search repository
High contrast
  1. Home
  2. Browse by Author

Browsing by Author "Ruede, David"

Filter results by typing the first few letters
Now showing 1 - 1 of 1
  • Results per page
  • Sort Options
  • Loading...
    Thumbnail Image
    Publication

    Molecular base sensitivity studies of various DUV resists used in semiconductor fabrication

    Ruede, David
    ;
    Ercken, Monique  
    ;
    Borgers, Tom  
    Proceedings paper
    2001, Optical Microlithography XIV, 27/02/2001, p.1020

Follow imec on

VimeoLinkedInFacebook

The repository

  • Contact us
  • Policy
  • About imec
Privacy statement | Cookie settings