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Browsing by Author "Ryu, Henry"

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    In-line critical dimension and sidewall roughness metrology study for compound nanostructure process control by in-line 3D atomic force microscopy

    Kim, Tae-Gon
    ;
    Ryu, Henry
    ;
    Jo, Ah-jin
    ;
    Cho, Sang-Joon
    ;
    Park, Sang-il
    ;
    Vandeweyer, Tom  
    Meeting abstract
    2016, 230th ECS Meeting: Pacific Rim Meeting - PRiME, 2/10/2016, p.1950

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