Browsing by Author "Sadegh, Najmeh"
Now showing 1 - 1 of 1
- Results per page
- Sort Options
Publication Extreme ultraviolet induced reactions of tin-oxo cage photoresists
Journal article2026, JOURNAL OF MATERIALS CHEMISTRY C, (14) 15, p.6177-6189
Extreme ultraviolet induced reactions of tin-oxo cage photoresists