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    High NA: Enabling Single Exposure for Metal Logic Designs

    Das, Shubhankar  
    ;
    Blanco, Victor  
    ;
    Jambaldinni, Shruti
    ;
    Saha, Arup
    ;
    De Silva Anuja
    Proceedings paper
    2026, Optical and EUV Nanolithography XXXIX,, 2026-02-22, p.139791E

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