Browsing by Author "Sahouria, Emile"
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Publication Design split algorithms validation for DPT implementation at 32 nm and beyond
;Tritchkov, Alexander ;Kempsell, Monica ;Glotov, Petr ;Sahouria, EmileKomirenko, SergiyProceedings paper2008, 5th International Symposium on Immersion Lithography Extensions, 22/09/2008Publication Double-patterning decomposition, design compliance, and verification algorithms at 32nm hp
;Tritchkov, Alex ;Glotov, Petr ;Komirenko, Sergey ;Sahouria, Emile ;Torres, AndresSeoud, AhmedProceedings paper2008, Photomask Technology 2008, 6/10/2008, p.71220S