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Browsing by Author "Saito, S.I."

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    Publication

    The impact of sub monolayers of HfO2 on the device performance of high-k transistors

    Ragnarsson, Lars-Ake  
    ;
    Pantisano, Luigi
    ;
    Kaushik, Vidya
    ;
    Saito, S.I.
    ;
    Shimamoto, Yasuhiro
    Proceedings paper
    2003-12, Technical Digest IEDM - International Electron Devices Meeting, 7/12/2003, p.87-88

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