Repository logo Institutional repository
  • Communities & Collections
  • Browse
  • Site
Search repository
High contrast
  1. Home
  2. Browse by Author

Browsing by Author "Saka, N."

Filter results by typing the first few letters
Now showing 1 - 2 of 2
  • Results Per Page
  • Sort Options
  • Loading...
    Thumbnail Image
    Publication

    Controlling scratching in Cu Cchemical-mechanical planarization (CuCMP)

    Eusner, Thor
    ;
    Saka, N.
    ;
    Chun, J-H
    ;
    Armini, Silvia  
    ;
    Moinpour, M.
    ;
    Fisher, P.
    Meeting abstract
    2008, 214th ECS Meeting, 12/10/2008, p.2064
  • Loading...
    Thumbnail Image
    Publication

    Controlling scratching in Cu chemical Journalmechanical planarization

    Eusner, T.
    ;
    Saka, N.
    ;
    Chun, J.H.
    ;
    Armini, Silvia  
    ;
    Moinpour, M.
    ;
    Fischer, P.
    Journal article
    2009, Journal of the Electrochemical Society, (156) 7, p.H528-H534

Follow imec on

VimeoLinkedInFacebook

The repository

  • Contact us
  • Policy
  • About imec
Privacy statement | Cookie settings