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Browsing by Author "Sakai, Kei"

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    Line edge roughness measurement technique of fingerprint in block copolymer thin film

    Isawa, Miki
    ;
    Sakai, Kei
    ;
    Rincon Delgadillo, Paulina  
    ;
    Gronheid, Roel  
    ;
    Yoshida, Hiroshi
    Proceedings paper
    2013, Metrology, Inspection, and Process Control for Microlithography XXVII, 25/02/2013, p.868114

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