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Browsing by Author "Salimullah M. M., Salimullah"

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    Impact of the plasma ambient and the ruthenium precursor on the growth of ruthenium films by plasma enhanced atomic layer deposition

    Swerts, Johan  
    ;
    Delabie, Annelies  
    ;
    Salimullah M. M., Salimullah
    ;
    Popovici, Mihaela Ioana  
    Journal article
    2012, ECS Solid State Letters, (1) 2, p.P19-P21

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