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Browsing by Author "Samanta, Suprakash"

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    Publication

    Effect of ammonium halide salts on wet chemical nanoscale etching and polishing of InGaAs surfaces for advanced CMOS devices

    Samanta, Suprakash
    ;
    Jin, Seungwan
    ;
    Lee, Chan-Hee
    ;
    Lee, Seong-Soo
    ;
    Struyf, Herbert  
    ;
    Kim, Tae-Gon
    Journal article
    2023, MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING, (161) July, p.Art. 07469

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