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Browsing by Author "Samara, V."

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    Experimental and theoretical study of RF capacitevely-coupled plasma in the Ar/CF4/CF3I mixtures

    Proshina, O.
    ;
    Rakhimova, T.
    ;
    Lopaev, D.
    ;
    Samara, V.
    ;
    Baklanov, Mikhaïl
    ;
    de Marneffe, Jean-Francois  
    Journal article
    2015, Plasma Sources Science and Technology, (24) 5, p.55006

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