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Browsing by Author "Samoilov, Arkadii"

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    Publication

    Integration of a recessed SiGe Source/Drain into a PMOS transistor

    Washington, Lori
    ;
    Nouri, Faran
    ;
    Verheyen, Peter  
    ;
    De Wolf, Ingrid  
    ;
    Moroz, Victor
    ;
    Kawaguchi, Mark
    Proceedings paper
    2005, 5th International SEMI-ECS Semiconductor Technology Conference, 15/03/2005

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