Browsing by Author "Sano, K."
Now showing 1 - 2 of 2
- Results Per Page
- Sort Options
Publication Challenges of single-wafer wet cleaning for low temperature pre-epitaxial treatment of SiGe
Proceedings paper2008, Ultra Clean Processing of Semiconductor Surfaces VIII - UCPSS, 18/09/2006, p.243-246Publication Single-wafer wet chemical oxide formation for pre-ALD high-k deposition on 300 mm wafer
Proceedings paper2008, Ultra Clean Processing of Semiconductor Surfaces VIII - UCPSS, 18/09/2006, p.53-56