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Browsing by Author "Santos, I."

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    Atomistic modeling of impurity ion implantation in ultra-thin-body Si devices

    Pelaz, L.
    ;
    Duffy, Ray
    ;
    Aboy, M.
    ;
    Marques, L.
    ;
    Lopez, P.
    ;
    Santos, I.
    ;
    Pawlak, Bartek  
    ;
    Van Dal, Mark  
    Proceedings paper
    2008, IEEE International Electron Devices Meeting - IEDM, 15/12/2008, p.535-538

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