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Browsing by Author "Sarkar, S."

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    Integration of Through-Dielectric-Via on Buried Power Rail and Slit Nano Through-Silicon-Via for Enhanced Backside Connectivity

    Zhao, Peng  
    ;
    Witters, Liesbeth  
    ;
    Stucchi, Michele  
    ;
    Montero Alvarez, Daniel  
    Proceedings paper
    2025, 2025 IEEE INTERNATIONAL INTERCONNECT TECHNOLOGY CONFERENCE, IITC, 2025-06-02

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