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Browsing by Author "Sasago, Masru"

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    Mask enhancer technology for 45-nm node contact hole fabrication

    Yuito, Takashi
    ;
    Wiaux, Vincent  
    ;
    Van Look, Lieve  
    ;
    Vandenberghe, Geert  
    ;
    Irie, Shigeo
    Proceedings paper
    2005, Optical Microlithography XVIII, 27/02/2005, p.1377-1387

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