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Browsing by Author "Sato, Nagisa"

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    Gas phase pore stuffing for the protection of organo-silicate glass dielectric materials

    Fujikawa, Makoto
    ;
    de Marneffe, Jean-Francois  
    ;
    Chanson, Romain
    ;
    Babaei Gavan, Khashayar  
    Proceedings paper
    2018, 2018 International Symposium on Semiconductor Manufacturing - ISSM, 10/12/2018, p.1-3

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