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Browsing by Author "Savage, T."

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    Improvement of cohesion strength in ULK OSG materials by pore structure adjustment

    Krishtab, Mikhail  
    ;
    Vanstreels, Kris  
    ;
    Savage, T.
    ;
    Matsunaga, K.
    ;
    De Gendt, Stefan  
    Meeting abstract
    2014, 23rd Materials For Advanced Metallization Conference - MAM, 2/03/2014, p.149-150

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