Browsing by Author "Saxena, Sagar"
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Publication Monotonic Machine Learning (MML) for Curvilinear OPC Retargeting in NA0.33 EUV Single-Patterning 28nm Metal Pitch Curvilinear Logic Technology
Proceedings paper2026, Optical and EUV Nanolithography XXXIX, 2026-02-22, p.1397926