Browsing by Author "Schade, K."
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Publication Dry processing for crystalline silicon solar cells
Oral presentation2003, 13th NREL Workshop on Crystalline Silicon Solar Cells Materials and ProcessingPublication In-line plasma surface etching and PECVD SiNX:H deposition for crystalline Si solar cell processing
Proceedings paper2005, Proceedings of the 20th European Photovoltaic Solar Engergy Conference and Exhibition, 6/06/2005, p.729-732Publication Very high frequency PECVD SiNx:H for fast deposition of anti-reflection coating and passivation of mc-Si solar cells
Proceedings paper2004, 19th European Photovoltaic Solar Energy Conference and Exhibition, 7/06/2004, p.982-985