Browsing by Author "Schaetzlein, W."
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Publication Optimization of a brush scrubber for nano-particles
Meeting abstract2001, 200th International Meeting Electrochemical Society: 7th International Symposium on Cleaning Technology in Semiconductor Device, 2/09/2001Publication Optimization of a brush scrubber for nano-sized particles
Proceedings paper2002, Cleaning Technology in Semiconductor Device Manufacturing VII, 4/09/2001, p.187-194