Repository logo Institutional repository
  • Communities & Collections
  • Scientific publicationsOpen knowledge
Search repository
High contrast
  1. Home
  2. Browse by Author

Browsing by Author "Schaetzlein, W."

Filter results by typing the first few letters
Now showing 1 - 2 of 2
  • Results per page
  • Sort Options
  • Loading...
    Thumbnail Image
    Publication

    Optimization of a brush scrubber for nano-particles

    Xu, Kaidong
    ;
    Vos, Rita  
    ;
    Arnauts, Sophia  
    ;
    Schaetzlein, W.
    ;
    Speh, U.
    ;
    Mertens, Paul  
    ;
    Heyns, Marc  
    Meeting abstract
    2001, 200th International Meeting Electrochemical Society: 7th International Symposium on Cleaning Technology in Semiconductor Device, 2/09/2001
  • Loading...
    Thumbnail Image
    Publication

    Optimization of a brush scrubber for nano-sized particles

    Xu, Kaidong
    ;
    Vos, Rita  
    ;
    Arnauts, Sophia  
    ;
    Lux, Marcel  
    ;
    Schaetzlein, W.
    ;
    Speh, U.
    ;
    Mertens, Paul  
    Proceedings paper
    2002, Cleaning Technology in Semiconductor Device Manufacturing VII, 4/09/2001, p.187-194

Follow imec on

VimeoLinkedInFacebook

The repository

  • Contact us
  • Policy
  • About imec
Privacy statement | Cookie settings