Browsing by Author "Schaus, Frederic"
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Publication Insights in junction photo-voltage based sheet resistance measurements for advanced CMOS
Proceedings paper2007, International Workshop on INSIGHT in Semiconductor Device Fabrication, Metrology and Modeling, 6/05/2007Publication Insights in junction photovoltage based sheet resistance measurements for advanced complementary metal-oxide semiconductor
Journal article2008, Journal of Vacuum Science and Technology B, (26) 1, p.420-424