Browsing by Author "Scheuerer, R."
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Publication Stable thin film encapsulation of acceleration sensors using polycrystalline silicon as sacrificial and encapsulation layer
;Hoechst, A. ;Scheuerer, R. ;Stahl, H. ;Fischer, F. ;Metzger, L. ;Reichenbach, R.Laermer, F.Journal article2004, Sensors and Actuators A, (114) 2_3, p.355-361