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Browsing by Author "Schippers, David"

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    CFET channel stack fabrication by wafer-to-wafer bonding and BESOI donor dismounting

    Tchouflian, Pauline  
    ;
    Barge, D.
    ;
    Hartmann, J.M.
    ;
    Kerdilès, S.
    ;
    Vincent, Larrey  
    ;
    Fournel, Frank  
    Journal article
    2026, MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING, 214, p.110826

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