Browsing by Author "Schreel, K."
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Publication Experimental proximity matching of ArF scanners
; ; ; ; Proceedings paper2008, SPIE Lithography Asia, 4/11/2008, p.714027Publication Freeform illumination sources: an experimental study of source-mask optimization for 22nm SRAM cells
Proceedings paper2010, Optical Microlithography XXIII, 21/02/2010, p.764008