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Browsing by Author "Schulze, H.-J."

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    Doping of oxidized float zone silicon by thermal donors- a low thermal budget doping method for device applications?

    Job, R.
    ;
    Ulyashin, A.G.
    ;
    Huang, Y.L.
    ;
    Fahrner, W.R.
    ;
    Simoen, Eddy  
    ;
    Claeys, Cor
    Proceedings paper
    2002, Defect- and Impurity-Engineered Semiconductors and Devices III, 1/04/2002, p.F9.5

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