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    Analysis of EUV induced depolymerization and side reactions of polyphthalaldehydes for dry develop EUV resist applications

    Naqvi, Bilal  
    ;
    Schwartz, Jared
    ;
    Engler, Anthony
    ;
    Kohl, Paul A.
    ;
    De Gendt, Stefan  
    ;
    De Simone, Danilo  
    Journal article
    2025-MAR 11, JOURNAL OF MATERIALS CHEMISTRY C

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