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Browsing by Author "Seabra, Antonio C."

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    E-beam direct write using a chemically amplified negative tone resist

    Seabra, Antonio C.
    ;
    Jonckheere, Rik  
    ;
    Van den hove, Luc  
    Proceedings paper
    1994, IX Congresso da Sociedade Brasileira de Microelectronica - IX SBMICRO, 08/08/1994, p.680-685

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