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Browsing by Author "Seidel, Robert"

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    Investigation of cross-linking poly(methyl methacrylate) as a guiding material in block copolymer directed self-assembly

    Seidel, Robert
    ;
    Rincon Delgadillo, Paulina  
    ;
    Ramirez-Hernandez, Abelardo
    ;
    Wu, Hengpeng
    Proceedings paper
    2014, Advances in Patterning Materials and Processes XXXI, 23/02/2014, p.90510K
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    Line Edge Roughness on Directed Self Assembly: Impact of process conditions

    MKuppuswamy, Vijaya Kumar
    ;
    Williamson, Lance
    ;
    Pathangi Sriraman, Hari
    ;
    Seidel, Robert
    Meeting abstract
    2015, SPIE Advance Lithography 2015, 22/02/2015, p.9424-31
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    The role of guide stripe chemistry in block copolymer directed self assembly

    Seidel, Robert
    ;
    Williamson, Lance
    ;
    Her, YoungJun  
    ;
    Kim, Jihoon
    ;
    Lin, Guanyang
    ;
    Nealey, Paul
    Proceedings paper
    2015, Advances in Patterning Materials and Processes XXXII, 22/02/2014, p.94250W

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