Browsing by Author "Seidel, Robert"
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Publication Investigation of cross-linking poly(methyl methacrylate) as a guiding material in block copolymer directed self-assembly
Proceedings paper2014, Advances in Patterning Materials and Processes XXXI, 23/02/2014, p.90510KPublication Line Edge Roughness on Directed Self Assembly: Impact of process conditions
;MKuppuswamy, Vijaya Kumar ;Williamson, Lance ;Pathangi Sriraman, HariSeidel, RobertMeeting abstract2015, SPIE Advance Lithography 2015, 22/02/2015, p.9424-31Publication The role of guide stripe chemistry in block copolymer directed self assembly
Proceedings paper2015, Advances in Patterning Materials and Processes XXXII, 22/02/2014, p.94250W