Browsing by Author "Seidl, K."
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Publication A floating 3D silicon microprobe array for neural drug delivery compatible with electrical recording
Journal article2011, Journal of Micromechanics and Microengineering, (21) 12, p.125001Publication CMOS-based high-density silicon microprobe array for electronic depth control in neural recording
;Seidl, K. ;Herwik, S. ;Nurcahyo, Y.; ;Keller, M. ;Schüttler, M.Pereira Neves, HerculesProceedings paper2009, 22nd IEEE International Conference on Micro Electro Mechanical Systems - MEMS, 25/01/2009, p.232-235Publication Fabrication technology for silicon-based microprobe arrays used in acute and sub-chronic neural recording
Journal article2009, Journal of Micromechanics and Microengineering, (19) 7, p.74008