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Browsing by Author "Serlenga, Vito"

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    Mechanisms of film deposition from BCl3-based plasma during dry etching

    Shamiryan, Denis
    ;
    Efremov, Alexander
    ;
    Serlenga, Vito
    ;
    Baklanov, Mikhaïl
    ;
    Boullart, Werner  
    Proceedings paper
    2009, International Conference on Micro- and Nano-electronics - ICMNE, 5/10/2009

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