Browsing by Author "Seshimo, Takehiro"
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Publication High-Fidelity Directed Self-Assembly Using Higher-X Polystyrene-Block-Poly(Methyl Methacrylate) Derivatives for Dislocation-Free Sub-10 nm Features
Journal article2025, ADVANCED FUNCTIONAL MATERIALS, (35) 24, p.2421066Publication Photobase generator enabled pitch division: a progress report
;Gu, Xinyu ;Cho, Younjin ;Kawakami, Takanori ;Hagiwara, Yuji ;Rawlings, BrandonMesch, RyanProceedings paper2011, Advances in Resist Materials and Processing Technology XXVIII, 27/02/2011, p.7972-14