Browsing by Author "Shaffer, E. O."
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Publication Integration of a low permittivity spin-on embedded hardmask for Cu/SiLK resin dual damascene
;Waeterloos, Joost ;Shaffer, E. O. ;Stokich, T. ;Hetzner, J. ;Price, D. ;Booms, L.Donaton, R. A.Proceedings paper2001, Proceedings of the IEEE 2001 International Interconnect Technology Conference, 1/06/2001, p.60-62