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Browsing by Author "Shao, Y."

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    Novel approach to conformal FINFET extension doping

    Zschaetzsch, Gerd
    ;
    Hoffmann, Thomas Y.
    ;
    Horiguchi, Naoto  
    ;
    Hautala, Y.
    ;
    Shao, Y.
    Proceedings paper
    2011, Ion Implantation Technology 2010. 18th International Conference, 6/06/2010, p.23

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