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Browsing by Author "Sheoran, M."

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    Hydrogen diffusion in silicon from plasma-enhanced chemical vapor deposited silicon nitride film at high temperature

    Sheoran, M.
    ;
    Kim, D.S.
    ;
    Rohatgi, A.
    ;
    Dekkers, Harold  
    ;
    Beaucarne, Guy
    ;
    Young, M.
    ;
    Asher, S.
    Journal article
    2008, Applied Physics Letters, (92) 17, p.172107

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