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Browsing by Author "Sherman, P. J."

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    Defectivity in chemical mechanical planarization: A multiscale approach

    Chandra, A.
    ;
    Bastawros, A. F.
    ;
    Biswas, R.
    ;
    Sherman, P. J.
    ;
    Armini, Silvia  
    Proceedings paper
    2008, Proceedings 13th Int. Conference on Chemical-Mechanical Polish (CMP) Planarization for ULSI Multilevel Interconnection - CMP-MIC, 4/03/2008, p.107-112

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