Browsing by Author "Shero, E."

Now showing 1 - 2 of 2

Atomic layer deposition: an enabling technology for microelectronic device manufacturing

Lee, F.
;
Marcus, S.
;
Shero, E.
;
Wilk, G.
;
Swerts, Johan
;
Maes, Jan
;
Blomberg, T.
;
Delabie, Annelies
Proceedings paper
2007, IEEE/SEMI Advanced Semiconductor Manufacturing Conference, 11/06/2007, p.359-365
Nitrided hafnium silicates for gate dielectrics

Wang, C.G.
;
Velasco, H.
;
Verghese, M.
;
Shero, E.
;
Wilk, G.
;
Maes, Jan
;
Laitinen, O.
;
Deweerd, Wim
Meeting abstract
2004, AVS 51st International Symposium, 14/11/2004, p.DI-MoA5