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Browsing by Author "Shimizu, Y."

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    N-type and p-type ultra shallow junctions by atomic layer epitaxy and laser anneal

    Nguyen, N.D.
    ;
    Souriau, Laurent  
    ;
    Shimizu, Y.
    ;
    Jiang, Sijia
    ;
    Rosseel, Erik  
    ;
    Everaert, Jean-Luc
    Oral presentation
    2011, 7th International Conference on Silicium Epitaxy and Heterostructures - ICSI-7

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